| 摘要 |
PROBLEM TO BE SOLVED: To provide a small, strong triaxial acceleration detecting unit with excellent temperature characteristics, and an acceleration sensor. SOLUTION: A piezoelectric substrate 3 of the acceleration detecting unit 1 has a weight part 3a, fixed parts 3b (3b1, 3b2), and a flexible thin-walled part 3c for connecting these fixed parts 3b and weight part 3a. A plurality of IDT electrodes 5, 6, 7, 8, 9 for exciting or receiving surface acoustic wave, and a plurality of grating reflectors 12, 13 for reflecting the surface acoustic wave, are formed on the piezoelectric substrate 3. A branching filter 11 for branching the surface acoustic wave excited by the IDT electrode 5, in three directions is further provided on the piezoelectric substrate 3. COPYRIGHT: (C)2009,JPO&INPIT |
