| 摘要 |
PROBLEM TO BE SOLVED: To provide a patterning method in which highly accurate patterning is possible, without affecting the performance of a display element. SOLUTION: In the patterning method of a substrate for the display element having a gas barrier layer formed of at least one organic region and at least one inorganic region, wet etching is carried out, and for the etching, etching liquid of weak acid or weak base is used. COPYRIGHT: (C)2009,JPO&INPIT
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