| 摘要 |
PROBLEM TO BE SOLVED: To improve uniformity of a film thickness in a surface direction by devising a gas ejection hole. SOLUTION: In a method of manufacturing a magnetic recording medium, at least a magnetic recording layer 22 and a medium protection layer 26 are formed on a disk substrate 1 using a vacuum deposition apparatus 100. The method of manufacturing the magnetic recording medium includes a step of carrying the disk substrate 1 into a chamber 102, a step of discharging air in the chamber 102 to substantially evacuate the chamber 102 into vacuum, and a step of introducing a gas into the chamber 102. In the step of introducing the gas, the plurality of gas ejection holes 114 are arranged along the outer circumference of the disk substrate 1, and the gas is ejected in a direction oblique to a radius direction of the disk substrate 1 by a prescribed angle. COPYRIGHT: (C)2009,JPO&INPIT
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