| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and method for measuring a parasitic capacitance of an automatic inspection facility precisely. SOLUTION: The method has several steps, first of all, an internal circuit is charged and discharged several times by a voltage driver unit. Next, the internal unit is self discharged, the voltage value changes from V1 to V2. Then, an interval of discharge time is measured, further, the time interval is substituted into mathematical expression of discharge, and a first R-C discharge equation is obtained. Moreover, an auxiliary inspection module is coupled with the automatic inspection facility. Then, the discharge steps are repeated and a second R-C discharge equation is obtained. Then, the parasitic resistance and capacitance are obtained by the simultaneous equations consisting of the first R-C discharge equation and the second R-C discharge equation. Therefore, the method can measure the parasitic capacitance existing the automatic inspection facility rapidly, and effectively. COPYRIGHT: (C)2009,JPO&INPIT
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