| 摘要 |
PROBLEM TO BE SOLVED: To perform uniform cooling processing in a substrate surface with inexpensive constitution while conveying the substrate. SOLUTION: A cooling processing unit 1C performs the cooling processing while conveying the substrate S after heating processing by a conveyor roller 14, and includes a cold generator which generates cold for cooling the substrate S and an exhausting means including a suction aperture 25a etc. for discharging the cold having cooled the substrate S. Conveyor rollers 14 have hollow shapes axially penetrating them, and pipes 28 for introduction are inserted which introduce the cold into openings at axially one-end sides. Further, a side wall member 24 and the like are provided which have the suction apertures 25a etc., opposite openings at axially other-side ends of the conveyor rollers 14. Further, each of the conveyors 14 is configured to have a supply position for cold on the axially opposite side from a supply position of an adjacent conveyor roller. COPYRIGHT: (C)2009,JPO&INPIT
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