| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe manufacturing method which provides short manufacturing time and can reduce manufacturing costs. SOLUTION: The probe manufacturing method is for a probe comprising a support part to be mounted to a substrate of a probe card, a beam part which has elasticity and is supported by the support part, and a tip part which is the tip of the beam part and has a contact tip to be in contact with an electrode of an object to be inspected. The method includes: a step of placing a mask in which a pattern of a connected body of probes which are arranged with a predetermined pitch and each of which is connected by a connecting part is drawn on a metallic base corresponding to the completed shape of the probe; a step of depositing a copper layer on the surface of the metallic base in accordance with the pattern of the mask; a step of depositing metal on the surface of the deposited copper layer to form a connected body of probes; and a step of separating the connected body of probes from the metallic base by melting the copper layer. A plurality of probes are manufactured so that they are connected by the connecting parts. COPYRIGHT: (C)2009,JPO&INPIT
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