INTEGRATED SEMICONDUCTOR TEMPERATURE DETECTION APPARATUS AND METHOD

摘要

An integrated semiconductor apparatus (300) (such as, but not limited to, a radio frequency power device) is comprised of a plurality of active device cells (302, 303), a plurality of temperature detectors (304, 305), and a controller (308). The active device cells are preferably each comprised of a plurality of active devices having a common signal input and a common signal output. The temperature detectors are preferably configured and arranged such that each of the temperature detectors detects a temperature indicator (such as infrared radiation) as corresponds to at least one of the active device cells but not, at least in substantial measure, other of the active device cells. The controller preferably operably couples to these temperature detectors and receives their detected output and generates control signals that operate on the inputs to the active device cells in a manner that changes the relative active device cell temperatures.