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发明名称
摘要
申请公布号
JP4260404(B2)
申请公布日期
2009.04.30
申请号
JP20020030877
申请日期
2002.02.07
申请人
发明人
分类号
C23C16/455;H01L21/28;H01L21/285
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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