发明名称 |
PROXIMITY MENISCUS MANIFOLD |
摘要 |
AN APPARATUS FOR PROCESSING A SUBSTRATE (108) IS PROVIDED WHICH INCLUDES A FIRST MANIFOLD MODULE (106) TO GENERATE A FLUID MENISCUS (140) ON A SUBSTRATE SURFACE. THE APPARATUS ALSO INCLUDES A SECOND MANIFOLD MODULE (102) TO CONNECT WITH THE FIRST MANIFOLD MODULE (106) AND ALSO TO MOVE THE FIRST MANIFOLD MODULE (106) INTO CLOSE PROXIMITY TO THE SUBSTRATE SURFACE TO GENERATE THE FLUID MENISCUS (140). |
申请公布号 |
MY137975(A) |
申请公布日期 |
2009.04.30 |
申请号 |
MY2005PI01477 |
申请日期 |
2005.04.01 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
CARL WOODS;MICHAEL G. R. SMITH;JOHN PARKS;JAMES P. GARCIA;JOHN M. DE LARIOS |
分类号 |
B05C9/02;B05D1/00;B05D3/12;H01L21/00;H01L21/02;H01L21/027;H01L21/304;H01L21/306 |
主分类号 |
B05C9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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