OPTICAL ELEMENT RETAINING DEVICE, EXPOSING DEVICE AND PRODUCTION METHOD OF DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical element retaining device capable of minimizing the lowering of the performance of an exposing device.

SOLUTION: This retaining device for retaining an optical element comprises: a body tube supporting the optical element by contacting with a first face of the optical element; a contact member contacting with a second face opposite to the first face of the optical element; a pressing member capable of moving in the optical axis direction of the optical element relative to the body tube; an elastic member interposed between the contact member and the pressing member and depressing the contact member to the side of the optical element relative to the pressing member; and an adjusting means having a grip for hand operation for adjusting the position of the pressing member relative to the body tube.

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