| 摘要 |
PROBLEM TO BE SOLVED: To measure a periodic structure even when the surface of interface of a base part is uniformly tilted. SOLUTION: Light of wavelength of periodic order of a periodic structure 10 is made incident to the surface of the structure 10 on a base part to measure a measured value of a reflection spectrum having wavelength dependency of reflected light intensity from the periodic structure 10. A computed value of a reflection spectrum is computed assuming the depth (d) of the periodic structure, a duty ratio (f) and the thickness distribution (Dmax, Dmin) of the base part, and the square sum of a difference between the measured value of the reflection spectrum and the computed value of the reflection spectrum is computed to output the depth (d) of the periodic structure, the duty radio (f) and the thickness distribution (Dmax, Dmin) of the base part assumed in computing the computed value of the reflection spectrum when the computed square sum of the difference is within a predetermined tolerance. COPYRIGHT: (C)2009,JPO&INPIT
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