| 摘要 |
PROBLEM TO BE SOLVED: To provide a support member reducing a camber of a plane which occurs in a substrate to be measured by reducing the influence of lower end face shape of the substrate to be measured when measuring the shape of the plane substrate. SOLUTION: The support member 17 supporting the lower end face 27 of the plane substrate P to position the plane substrate P in a vertical state in measuring the shape of the plane substrate P, comprises a cross section of upward projecting shape and a curved surface shape 17b with the cross section extending in one direction, and is placed so that a ridgeline part of the curved surface shape 17b provided at the support member 17 abuts against the plate thickness direction center part of the lower end face 27 of the plane substrate P. COPYRIGHT: (C)2009,JPO&INPIT
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