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发明名称
Vorrichtung und Verfahren zur Herstellung von Halbleitereinkristallen
摘要
申请公布号
DE112006002850(T5)
申请公布日期
2009.04.30
申请号
DE20061102850T
申请日期
2006.10.11
申请人
KOMATSU DENSHI KINZOKU K.K.
发明人
KUBOTA, TOSHIMICHI;KAWASAKI, EIICHI;TOMONAGA, TSUNEAKI;KAWAZOE, SHINICHI
分类号
C30B15/00;C30B29/06
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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