发明名称 SLIT VALVE DOOR
摘要 The present invention provides a slit valve for sealing an opening in a chamber, wherein the slit valve includes a door having an interior and an exterior surface. A sealing member is disposed on the interior surface of the door near a periphery of the interior surface of the door, and a portion of the interior surface extends outwardly from the door and into the chamber so as to disrupt a flow of chemicals flowing towards the sealing member from within the chamber.
申请公布号 WO2009002771(A3) 申请公布日期 2009.04.30
申请号 WO2008US67272 申请日期 2008.06.18
申请人 GREENE, TWEED OF DELAWARE, INC. 发明人 THRASH, AARON;TILLES, DEAN;TRAINER, CAROLE
分类号 F16K1/46;F16K1/32;H01L21/00 主分类号 F16K1/46
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