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发明名称
METHOD FOR ABRASING GaN SUBSTRATE
摘要
申请公布号
EP1814149(A4)
申请公布日期
2009.04.29
申请号
EP20050822594
申请日期
2005.12.28
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
MATSUMOTO, NAOKI
分类号
H01L21/304;B24B37/04;B24B37/12
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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