发明名称 |
SMALL FOOTPRINT MODULAR PROCESSING SYSTEM |
摘要 |
<p>A method and apparatus for a modular processing system is described. The apparatus includes a transfer chamber as the foundation for the system and includes sidewalls adapted to receive at least three 200 mm and/or 300 mm process chambers. The transfer chamber includes a robot capable of withstanding high temperatures and is configured to transfer 200 mm and 300 mm substrates. The modularity of the transfer chamber is highly transportable and provides a research and development platform at a low cost of ownership and may be modularly built into a production system as additional chambers and peripheral hardware is added.</p> |
申请公布号 |
KR20090042280(A) |
申请公布日期 |
2009.04.29 |
申请号 |
KR20097003760 |
申请日期 |
2009.02.24 |
申请人 |
APPLIED MATERIALS INC. |
发明人 |
MYO NYI OO;POPPE STEVEN;WHITE ANTHONY;KRISHNA NETY M. |
分类号 |
H01L21/677;B65G49/07;H01L21/67;H01L21/68 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|