CONNECTING MEMBER, AND GROUND STRUCTURE, HEATER AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE CONNECTING MEMBER

摘要

A connecting member and a ground structure, heater and an apparatus for processing a substrate including a connecting member are provided to prevent an occurrence of arcing due to a poor contact of each of the connecting members. A ground terminal is griped from a clamping unit(132). A clamping unit is arranged within an accommodating groove. A fixing unit(134) is arranged in order to contact a ground mount within the accommodating groove. A bending unit(136) connects the clamping unit and the fixing unit. The bending unit is curved, so that the clamping unit griping the ground terminal moves along with the longitudinal direction of the ground terminal according to the thermal expansion of the ground terminal.