| 摘要 |
A MEMS(MICRO ELECTRO MECHANICAL SYSTEMS) scanner having an actuator separated from a mirror is provided to minimize the weight of a second movable stage since a coil or a magnetic is not attached to the second movable stage. A MEMS scanner is composed of a stationary frame(110), a first movable stage(120), a second movable stage(130), and an electromagnetic actuator(140). The first movable stage is placed inside the stationary frame, and the stationary frame and the first movable stage are connected through a first torsion spring(122). The first movable stage and the second movable stage are connected through a second torsion spring(132). The first movable stage is directly driven with the actuator. The second mobile stage is driven by an indirect drive of the first movable stage. The electromagnetic actuator rotates and vibrates the first movable stage.
|
