METHOD OF FABRICATING ARMOPHOUS SILICON THIN FILM

摘要

A method of fabricating an amorphous silicon thin film is provided to reduce the number of a poly silicon polymerization processes by using a Wurtz-type reductive coupling. A silicon monomer is mixed in the organic solvent and a dissipative system is formed. A metallic catalyst is dispersed in the dissipative system and the polysilanes polymer is formed. The polysilanes polymer is filtered, and a poly silicon is separated. The poly silicon is dissolved in the organic solvent and the polysilanes liquid is formed. The polysilanes liquid is deposited on the substrate, and the deposited polysilanes liquid is irradiated with UV rays and an amorphous silicon thin film is formed.