摘要 |
<p>An economical process for low temperature air fractionation and an economical apparatus thereby are provided to be used in semiconductor industry or pyrogenic silicic acid production industry conveniently. An economical process for low temperature air fractionation comprises the following steps of: flowing injected air(8) to a distillation tower system having one or more single tower(12); heating one or more nitrogen or product streams(15,16,17) having oxygen in a main heat exchanger; condensing first residual fractions(14,19) partly; expanding a first part(20) of the first residual fractions in downstream of an upper condenser; re-compressing second residual fractions(18,29); and gaining gaseous additional generation materials(72,73) while evaporating fluid(71) from a liquid tank to a liquid state.</p> |