| 摘要 |
<p>A management for higher productivity of semiconductor photo process is provided to manage productivity of a photo process efficiently by analyzing a defect of data of a scanner and track equipment. Whenever a wafer(50a) is transferred inside a track device(20), a module ID, a wafer ID, input/output time a wafer which are related to the track device are transmitted to a server(10). The server computes a time when a wafer is stayed at each module by subtracting the input time from the output time while computing a movement time.</p> |
