发明名称 |
Microengineerd vacuum interface for an ionization system |
摘要 |
A planar component for interfacing an atmospheric pressure ionizer to a vacuum system is described. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon. |
申请公布号 |
EP1865533(A3) |
申请公布日期 |
2009.04.29 |
申请号 |
EP20070109370 |
申请日期 |
2007.05.31 |
申请人 |
MICROSAIC SYSTEMS LIMITED |
发明人 |
SYMS, RICHARD;MOSELEY, RICHARD WILLIAM |
分类号 |
H01J49/04 |
主分类号 |
H01J49/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|