| 摘要 |
An organoruthenium complex represented by the general formula (1-1):
wherein X represents a group represented by the general formula (1-2):
wherein R a and R b independently represent a linear or branched alkyl group having 1 to 5 carbon atoms;
Y represents a group represented by the above general formula (1-2), or a linear or branched alkyl group having 1 to 8 carbon atoms;
Z represents a hydrogen atom, or an alkyl group having 1 to 4 carbon atoms; and
L represents an unsaturated hydrocarbon compound having at least two double bonds,
bis(acetylacetonato)(1,5-hexadiene)ruthenium, and bis(acetylacetonato)(1,3-pentadiene)ruthenium have low melting points, and show excellent stability against moisture, air and heat. These ruthenium complexes are suitable for the film formation by a CVD method.
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