发明名称 Microscope with micromirror array simultaneously providing two different deflection paths
摘要 The present invention relates to a microscope (100) having an illumination unit (4) for generating an illumination beam path (4b, 4a), the microscope (100) comprising a main objective (2) that defines an observation beam path (17a) and comprising at least one deflection element (5, 6, 7) for deflecting the observation beam path (17a), at least one of the deflection elements (5, 6, 7) being embodied as a micromirror array (5') having individually controllable and adjustable micromirrors (50), the micromirrors of the micromirror array (5') being adjustable in such a way that in addition to the observation beam path (17a, 17b), the illumination beam path (4a, 4b) also proceeds via this micromirror array (5').
申请公布号 US7525727(B2) 申请公布日期 2009.04.28
申请号 US20070747349 申请日期 2007.05.11
申请人 LEICA MICROSYSTEMS (SCHWEIZ) AG 发明人 SANDER ULRICH
分类号 G02B21/06 主分类号 G02B21/06
代理机构 代理人
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