发明名称 X-ray source for materials analysis systems
摘要 A miniaturized, increased efficiency x-ray source for materials analysis includes a laser source, an optical delivery structure, a laser-driven thermionic cathode (108), an anode (122), and a target from the laser source and directs the beam onto a surface of the themionic cathode. The surfaces electrons form an electron beam along a beam path. The target element (110) is disposed in the beam path, and emits x-rays in response to incident accelerated electrons from the thermionic cathode. The target element includes an inclined surface that forms an angle of inclination (113) of about 40 degrees with respect to the electon beam path, so that x-rays are emitted from the target substantially at an angle of about 45 degrees with respect to the electron beam path.
申请公布号 US7526068(B2) 申请公布日期 2009.04.28
申请号 US20060481392 申请日期 2006.03.23
申请人 CARL ZEISS AG 发明人 DINSMORE MARK
分类号 H01J35/30;H01J35/06;H01J35/32 主分类号 H01J35/30
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