发明名称 |
Multigate device with recessed strain regions |
摘要 |
Embodiments of the invention provide a device with a multiple gates. Stress material within recesses of a device body metal gate may cause a stress in channel regions of the device, thereby improving performance of the device.
|
申请公布号 |
US7525160(B2) |
申请公布日期 |
2009.04.28 |
申请号 |
US20050320309 |
申请日期 |
2005.12.27 |
申请人 |
INTEL CORPORATION |
发明人 |
KAVALIEROS JACK T.;BRASK JUSTIN K.;DATTA SUMAN;DOYLE BRIAN S.;CHAU ROBERT S. |
分类号 |
H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 |
主分类号 |
H01L29/76 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|