发明名称 Multigate device with recessed strain regions
摘要 Embodiments of the invention provide a device with a multiple gates. Stress material within recesses of a device body metal gate may cause a stress in channel regions of the device, thereby improving performance of the device.
申请公布号 US7525160(B2) 申请公布日期 2009.04.28
申请号 US20050320309 申请日期 2005.12.27
申请人 INTEL CORPORATION 发明人 KAVALIEROS JACK T.;BRASK JUSTIN K.;DATTA SUMAN;DOYLE BRIAN S.;CHAU ROBERT S.
分类号 H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L29/76
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