| 摘要 |
An infrared sensor includes a base plate having a membrane portion at the center thereof an a thick portion around the membrane, a thermocouple unit having a hot side contact member formed on the membrane portion and a cool side contact member formed on the thick portion, a heater formed near the thermocouple unit, a hot side thermo-sensitive resistor formed on the membrane portion and a cool side thermo-sensitive resistor formed on the thick portion. The heater, the hot side thermo-sensitive resistor and the cool side thermo-sensitive resistor are made of the same material as the hot side contact or the cool side contact. Therefore, additional manufacturing step is not necessary to form the heater and the resistors.
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