发明名称 High resolution energy detector
摘要 Apparatus for detecting radiation, including a semiconductor which is arranged to interact with photons of the radiation, and a plurality of electrodes which are configured to sense respective charge distributions in response to interactions of the photons with a region of the semiconductor. The apparatus includes circuitry having respective detector circuits coupled to the electrodes to detect the interactions. The circuitry is configured to receive the respective charge distributions from two or more of the electrodes so as to generate respective energy distributions of the photons for each of the two or more electrodes, to compensate for variations in detection characteristics of the respective detector circuits so as to align the respective energy distributions with each other to form aligned distributions, to sum the aligned distributions to generate an overall energy distribution of the photons, and to output a signal indicative of the overall energy distribution.
申请公布号 US7525098(B2) 申请公布日期 2009.04.28
申请号 US20070729141 申请日期 2007.03.28
申请人 ORBOTECH LTD. 发明人 EL-HANANY URI;SHAHAR ARIE;TSIGELMAN ALEX
分类号 H01L27/00 主分类号 H01L27/00
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