| 摘要 |
A photoresist coating device and a controlling method thereof are provided to prevent the photoresist from flowing in a chamber by applying an emergency stop signal independent of a recipe of the pumping unit to a pumping unit when the emergency situation occurs inside the chamber. An stop alarm is confirmed by determining the abnormality inside a chamber(S10). When the stop alarm occurs, the controller generates an emergency stop signal to the pumping unit(S20). The clear state of the chamber error is checked(S30). When the chamber error is cleared, the controller transmits the error clear signal to the pumping unit(S40). The photoresist is recharged in the pumping unit. The photoresist is supplied to the object through the spray unit by using the pumping unit.
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