发明名称 |
Method and apparatus for measuring the size of free air balls on a wire bonder |
摘要 |
A system for measuring the size of free air balls for use with a wire bonder having a wire bonding tool and an Electric Flame Off (EFO) device is provided. The system includes an imager disposed above a first image plane, a prism disposed below the imager, and at least one lens positioned between the first image plane and the prism in a first optical path. The at least one lens is positioned between the prism and the imager in a second optical path, where the second optical path is different from the first optical path. An image of the free air ball disposed at a lower portion of the wire bonding tool is provided to the imager via the prism and the at least one lens.
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申请公布号 |
US7523848(B2) |
申请公布日期 |
2009.04.28 |
申请号 |
US20050148540 |
申请日期 |
2005.06.09 |
申请人 |
KULICKE AND SOFFA INDUSTRIES, INC. |
发明人 |
BEATSON DAVID T.;SOOD DEEPAK;LUCAS NORMAN;WANG ZHIJIE |
分类号 |
B23K31/02;B23K20/00;B23K20/10;B23K31/12;B23K37/00;G01B11/00 |
主分类号 |
B23K31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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