摘要 |
A door holder moving apparatus for an FOUP(Front Opening Unified Pod) opener is provided to distribute a partial load of a lifting unit to an opener by hanging the load of the lifting unit in both sides of the upper part without concentrating the load on a forward and backward device. A forward and backward unit(100) includes an FOUP door support stand(110), a first driving motor(120), and a lifting connection stand(140). The FOUP door stand includes a holder support arm(111). An LM guide inserting groove(112) is formed in both sides of the bottom. An axis the first drive motor is connected to a motor fixing stand. A lifting connection stand supports an LM guide(130) in both side of the upper part. A lifting unit is fixed to the lifting connection stand.
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