发明名称 PROCESS LIQUID WASTE TREATMENT APPARATUS
摘要 A process liquid waster treatment apparatus is provided to separate a processing piece from the processing liquid waste by injecting the fine power to a filter bed with a cylindrical shape of a filter. The processing liquid waste is received in a liquid waste tank(2). A pump(3) transfers the liquid waster from the liquid waste tank. The filter filters the transferred process liquid waste. The filter is composed of a filter bed with a cylindrical shape, a bottom plate(43), and an upper plate(44). A cylindrical body covers the circumference of the filter bed. A plurality of openings are formed in the side of the cylindrical body. A liquid waste input unit(441) is formed in the upper plate. The fine powder(40) is injected to the filter bed.
申请公布号 KR20090039606(A) 申请公布日期 2009.04.22
申请号 KR20080093116 申请日期 2008.09.23
申请人 DISCO CORPORATION 发明人 FURONAKA TAKESHI;YOSHIDA MIKI
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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