| 摘要 |
An apparatus for testing suitability of parts for a substrate cleaning apparatus is provided to reduce a time and a cost for manufacturing cleaning parts by directly testing suitability for the cleaning part of an object in a wet station. An object(10) is received in a cleaning unit(100). The cleaning unit forms a testing environment for the object. The deionized water is supplied to the cleaning unit through the deionized water line. A test unit(130) is connected to the cleaning unit and detects the particles included in the deionized water. The cleaning unit includes an inner bath and an outer bath. The inner bath is connected to the deionized water line and receives the object and the deionized water. The outer bath is positioned outside the inner bath and receives the deionized water from the inner bath.
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