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发明名称
Method of processing an object having an oxide film on its surface and apparatus for performing said method
摘要
申请公布号
EP2043138(A3)
申请公布日期
2009.04.22
申请号
EP20080022267
申请日期
1998.05.29
申请人
TOKYO ELECTRON LIMITED
发明人
KOBAYASHI, YASUO
分类号
H01L21/302;H01L21/306;H01J37/32;H01L21/00;H01L21/205;H01L21/304;H01L21/3065;H01L21/311
主分类号
H01L21/302
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