| 摘要 |
Apparatus for generating a homogeneous angular distribution of laser irradiation ( 17 ), the said apparatus comprising a first homogenization stage ( 10 ) with a first substrate ( 1 ), which includes an entrance face and exit face, wherein a first lens array ( 4 ) is disposed on the entrance face and/or on the exit face, through which first lens array the laser irradiation ( 17 ) to be homogenized can pass, as well as a second homogenization stage ( 11 ) with a second substrate ( 2 ), which includes an entrance face and an exit face, wherein a second lens array ( 5 ) is disposed on the entrance face and/or on the exit face, through which second lens array the laser irradiation ( 17 ) emitted from the first lens array ( 4 ) can pass, wherein the laser irradiation ( 17 ), after exiting from the second homogenization stage, has a comparably homogeneous angular distribution, wherein the second homogenization stage ( 11 ) in addition to the second substrate ( 2 ) has a third substrate ( 3 ), which includes an entrance face and an exit face, wherein a third lens array ( 6 ) is disposed on the entrance face and/or on the exit face, the said third lens array being at a spacing from the second lens array ( 5 ), wherein the distance (d<SUB>1</SUB>, d<SUB>2</SUB>) between the second and the third substrate influences the angular distribution. |
