发明名称 TAKE-UP TYPE VACUUM FILM COATING DEVICE WITH MASK FORMING MEANS
摘要 [Object] To provide a roll-to-roll vacuum deposition apparatus capable of easily and speedily adjusting a pressing force between a printing roller and a backup roller. [Solving Means] In the present invention, by adjusting a pressing force between a printing roller (33) and a backup roller (21) through a relative movement of a mask forming unit (20) including the printing roller (33) and a transfer roller (32) with respect to a vacuum chamber (11), individual adjustments of the printing roller (33) and the transfer roller (32) are eliminated and an adjustment of a pressing force on a unit basis is realized, thus achieving simplification of a structure, simplification and enhancement in precision of tasks, and a reduction in work time.
申请公布号 EP2050838(A1) 申请公布日期 2009.04.22
申请号 EP20070791339 申请日期 2007.07.26
申请人 ULVAC, INC. 发明人 HAYASHI, NOBUHIRO;FUJII, TOMOHARU;TADA, ISAO;NAKATSUKA, ATSUSHI
分类号 C23C14/56;B05C1/08;C23C14/04;H01G13/00 主分类号 C23C14/56
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