发明名称 |
TAKE-UP TYPE VACUUM FILM COATING DEVICE WITH MASK FORMING MEANS |
摘要 |
[Object] To provide a roll-to-roll vacuum deposition apparatus capable of easily and speedily adjusting a pressing force between a printing roller and a backup roller. [Solving Means] In the present invention, by adjusting a pressing force between a printing roller (33) and a backup roller (21) through a relative movement of a mask forming unit (20) including the printing roller (33) and a transfer roller (32) with respect to a vacuum chamber (11), individual adjustments of the printing roller (33) and the transfer roller (32) are eliminated and an adjustment of a pressing force on a unit basis is realized, thus achieving simplification of a structure, simplification and enhancement in precision of tasks, and a reduction in work time.
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申请公布号 |
EP2050838(A1) |
申请公布日期 |
2009.04.22 |
申请号 |
EP20070791339 |
申请日期 |
2007.07.26 |
申请人 |
ULVAC, INC. |
发明人 |
HAYASHI, NOBUHIRO;FUJII, TOMOHARU;TADA, ISAO;NAKATSUKA, ATSUSHI |
分类号 |
C23C14/56;B05C1/08;C23C14/04;H01G13/00 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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