发明名称 ELECTROLYSIS APPARATUS AND ELECTROLYSIS METHOD FOR SULFURIC ACID, AND APPARATUS FOR PROCESSING SUBSTRATE
摘要 <p>Disclosed is an electrolysis apparatus for sulfuric acid, which comprises an electrolysis vessel (1) wherein a cathode chamber (5) provided with a cathode (5a) and an anode chamber (6) provided with an anode (6a) are separated by a diaphragm (4), a sulfuric acid tank for storing sulfuric acid, a feed pipe (14) connecting the sulfuric acid tank with an inlet of the cathode chamber, a connection pipe (17) connecting an outlet of the cathode chamber and an inlet of the anode chamber, a first feed pump (13) arranged onto the feed pipe for supplying sulfuric acid from the sulfuric acid tank to the cathode chamber through the feed pipe, and a discharge pipe (18) connected to an outlet of the anode chamber for supplying a solution containing an oxidizing chemical species produced by electrolysis in the anode chamber to a liquid storage vessel.</p>
申请公布号 KR20090039676(A) 申请公布日期 2009.04.22
申请号 KR20087030156 申请日期 2008.01.11
申请人 SHIBAURA MECHATRONICS CORPORATION;KABUSHIKI KAISHA TOSHIBA;CHLORINE ENGINEERS CORP., LTD. 发明人 KOBYAYSHI NOBUO;SHIBATA YUKIHIRO;HAYAMIZU NAOYA;KATO MASAAKI
分类号 C25B1/28;H01L21/304 主分类号 C25B1/28
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