| 发明名称 |
Energy filter for cold field emission electron beam apparatus |
| 摘要 |
An electron beam apparatus 1 and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam 14 having an asymmetric first energy distribution is generated by means of an electron source 10. The primary electron beam is high-pass energy filtered using a retarding lens 30.
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| 申请公布号 |
EP2051278(A1) |
申请公布日期 |
2009.04.22 |
| 申请号 |
EP20070020340 |
申请日期 |
2007.10.17 |
| 申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH |
发明人 |
ZHOU, FANG;FROSIEN, JUERGEN;ADAMEC, PAVEL |
| 分类号 |
H01J37/05;H01J37/073;H01J37/153;H01J49/48 |
主分类号 |
H01J37/05 |
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