发明名称 |
Method of fabricating micro actuator having media stage |
摘要 |
A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate. |
申请公布号 |
US7520998(B2) |
申请公布日期 |
2009.04.21 |
申请号 |
US20060595876 |
申请日期 |
2006.11.13 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK HONG-SIK;HONG SEUNG-BUM;SHIM JONG-YOUP |
分类号 |
C23F1/00;B81C3/00;G11B9/14;H02K41/02;H02K41/03 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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