| 摘要 |
Disclosed is a robot for transferring a substrate, wherein the robot has a robot arm, a hand part, which includes a plurality of plates. A plurality of pins protrude from the plates such that each pin may be folded downward. The pins include a rubber or resin with thermally insulating properties. By selectively folding down a certain number of the pins, contact may be minimized between the substrate and the robot, thereby preventing damage to the substrate such as thermally-induced defects and stains.
|
