发明名称 |
Chemical sensor with oscillating cantilevered probe and mechanical stop |
摘要 |
The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.
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申请公布号 |
US7521257(B2) |
申请公布日期 |
2009.04.21 |
申请号 |
US20040777282 |
申请日期 |
2004.02.10 |
申请人 |
THE BOARD OF REGENTS OF THE NEVADA SYSTEM OF HIGHER EDUCATION ON BEHALF OF THE UNIVERSITY OF NEVADA, RENO |
发明人 |
ADAMS JESSE D.;ROGERS BENJAMIN S. |
分类号 |
G01N33/00;G01Q60/24;G01N27/00;G01Q60/34;G01Q70/18;H01J3/14 |
主分类号 |
G01N33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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