| 摘要 |
A method of predicting surface temperature of 2d matrix array probe is provided to simplify temperature prediction procedure and reduce temperature prediction cost by predicting probe surface temperature exactly and rapidly. A method of predicting surface temperature of 2d matrix array probe comprises: a step selecting one converting element among a plurality of converting elements(110); a step for measuring the first temperature in multiple positions of a probe(100) surface; a step for applying driving signals in the selected converting element; a step for measuring the second temperature in the multiple positions of the probe surface; a step for setting up the probe surface temperature function changed according to a single converting element drive based on the measured results; a step for determining property coefficient of the probe and exothermic coefficient of the selected converting element; and a step for predicting the probe surface temperature according to the drive of the multiple converting elements based on the set probe surface temperature function.
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