| 摘要 |
A susceptor and a manufacturing method of a semiconductor using the same are provided to improve a wavelength uniformity of a wafer loaded in a susceptor by replacing a part coated in the susceptor only. A susceptor(150) is formed by bonding a base susceptor(120) and a top susceptor(130). A top of the base susceptor includes a concave part(121,124) and a convex part(122). The concave part corresponds to a loading region of the top susceptor. The convex part corresponds to a loading region of a wafer. Width of the concave part formed between the convex parts is changed according to the number of pockets. A wafer support hole(133) is formed on a region of the top susceptor corresponding to the convex part of the base susceptor, and supports a circumference of the wafer. A body(131,134) of the top susceptor except for the wafer support hole is loaded in the concave part of the base susceptor.
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