发明名称 |
Laser processing apparatus and laser processing method |
摘要 |
A laser processing apparatus is provided including: a laser generator generating a light beam; a branching means for branching out the light beam to a plurality of beams arranged at equal intervals; a shifting means for shifting the plurality of beams at a pitch equal to a multiple of natural number of the arranged intervals relatively over a target; and a control means for controlling the intensity of the beam synchronously with the shifting pitch of the plurality of beams.
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申请公布号 |
US7521649(B2) |
申请公布日期 |
2009.04.21 |
申请号 |
US20040984674 |
申请日期 |
2004.11.09 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
UMETSU KAZUSHIGE;SAWAKI DAISUKE |
分类号 |
B23K26/06;H01L27/14;B23K26/00;B23K26/067;B23K26/08 |
主分类号 |
B23K26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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