SUBSTRATE TRANSFER APPARATUS

摘要

A substrate transfer apparatus is provided to decrease a substrate defect rate by suppressing the particle generated by the friction. A substrate transfer apparatus(200) includes an upper housing(210), a lower housing(220), a nozzle(224) and a roller. The upper housing is filled with the water provided through a water supply pipe(212). The lower housing is positioned in the bottom of the upper housing. An air supply pipe(222) is connected to the lower housing. A nozzle is extended from the upper part of the lower housing to the upper part of the upper housing. A roller is arranged in both sides of the upper housing in order to transfer the substrate. An end part of a nozzle is inserted into a spray hole(214). The bottom part of the substrate is supported by the water and the air sprayed through a nozzle. The water supply pipe sprays the water to the bottom of the upper housing. The water filled in the upper housing generates a vortex phenomenon.