| 摘要 |
A roller device for substrate conveyance is provided to prevent the scratch from being generated on the surface of a substrate due to the slip between a conveying roller and a substrate conveying shaft by firmly fixing the conveying roller and substrate conveying shaft. A roller(100) comprises a hooking groove(110) and a guide unit and is inserted into the external circumference of a conveying shaft for transferring a substrate. Fixing units(200, 200') are respectively located at both-side ends of a pair of rollers having the same structure and are combined between the external circumference of the conveying shaft and the inner circumference of the roller. Combining planes(210, 210') comprise hooking protrusions at the outer circumference. The hooking protrusions(211, 211') are inserted into a hooking groove(110) to prevent the slip phenomenon between the roller and fixing units in the rotation direction of a shaft(S). |
