发明名称 NOZZLE CLEANING DEVICE AND CLEANING METHOD
摘要 A nozzle cleaning device and a cleaning method thereof are provided to increase a lifespan of a slit nozzle by performing a sealing member function to prevent the exposure of a discharging part of the slit nozzle and a cleaning function. A pair of cleaning blocks(50) have the length corresponding to the length of the width direction of a slit nozzle(20). The cleaning blocks are arranged to interpose the slit nozzle. A moving unit(60) includes an actuator(62) horizontally moving the pair of cleaning blocks and an elastic member(64) elastically connecting the cleaning blocks with the actuator. A cleaning unit cleans the foreign material and solution of the cleaning blocks.
申请公布号 KR100893670(B1) 申请公布日期 2009.04.20
申请号 KR20070080381 申请日期 2007.08.10
申请人 K.C.TECH CO., LTD. 发明人 CHO, KANG IL
分类号 H01L21/304 主分类号 H01L21/304
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