| 摘要 |
<p>PURPOSE: A load lock chamber is provided to prevent a substrate stacked at the inside thereof from breaking by absorbing an impact generating due to the contact between a supporting member and a substrate. CONSTITUTION: The load lock chamber(100) comprises a chamber body(200) which provides a space for loading a large glass mother substrate(500). A first support member(300) supports both side edges of the large glass mother substrate(500). A second support member(400) prevents the center portion of the large glass mother substrate(500) from bending. The chamber body(200) comprises a robot arm as a transfer device for transferring the large glass mother substrate(500) from the outside to the inside of the load lock chamber(100). A communication opening/closing port is for entering and leaving the large glass mother substrate(500). A pump makes the inside of the load lock chamber as a high vacuum state.</p> |
