| 摘要 |
<p>A fluid flow distribution and a supply unit and flow distribution control program are provided to output a process gas by controlling the amount of a process gas according to valve opening time. A fluid division feeding unit(1) is connected to a substrate processing apparatus, and a process gas line(15) is connected with the purge gas line(16) between an input side air operate valve(7) and mass flow controller(8). A purge gas line is branched from the common purge line(17), and a check valve(12) and the purge valve(13) are arranged in the purge gas line. Valves(10A, 10B, 10C) are connected to a gas controller(115) through a classification controller(21) which is installed in the gas box. A manual valve(2) is connected to a gas source, and filters(11A, 11B, 11C) are connected the nozzles(106a, 106b, 106c) of the process chamber. The classification controller controls the whole operation of the substrate processing apparatus while being connected with the gas controller.</p> |
