| 摘要 |
A liquid supply system is provided to return liquid medicine remaining on a transfer pump by forming a liquid medicine collecting line connecting a liquid transfer pump and a liquid tank. A liquid tank is provided to store and reserve a liquid medicine. A pump transferring the reserved liquid medicine to a liquid buffer tank(20) is connected to the liquid medicine tank. The reserved tank is moved to the liquid medicine tank along the liquid supply line(12) by gas pressure. The liquid buffer tank stores the liquid medicine while being connected with the liquid medicine tank. The liquid medicine supply pump supplies the liquid medicine to a substrate processing unit. The liquid medicine tank, the liquid buffer tank, and the liquid medicine transfer pump are connected with the liquid medicine supply line.
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